Coating processes – Centrifugal force utilized
Patent
1994-01-11
1994-10-25
Beck, Shrive
Coating processes
Centrifugal force utilized
118 52, B05D 32
Patent
active
053587405
ABSTRACT:
An apparatus and method is provided for spin coating films on a surface. The apparatus includes a chamber capable of being closed to the atmosphere, a spinnable member within the chamber capable of supporting the surface and a pump capable of reducing the pressure within the chamber. The method includes depositing a liquid on the surface, reducing the pressure in the vicinity of the surface and spinning the surface.
REFERENCES:
patent: 3902857 (1975-09-01), Van der Mey et al.
patent: 4004045 (1977-01-01), Stelter
patent: 4163751 (1979-08-01), Van der Mey et al.
patent: 4385083 (1983-05-01), Shelley
patent: 4551355 (1985-11-01), Ericson et al.
patent: 4587139 (1986-05-01), Hagan et al.
patent: 4640846 (1987-02-01), Kuo
patent: 4673996 (1987-06-01), White
patent: 4743416 (1988-05-01), Sugimoto et al.
patent: 4794021 (1988-12-01), Potter
patent: 4838979 (1989-06-01), Nishida et al.
patent: 4889069 (1989-12-01), Kawakami
patent: 4894351 (1990-01-01), Batty
patent: 4935095 (1990-06-01), Lehrer
patent: 4992301 (1991-02-01), Shishiguchi et al.
patent: 5066616 (1991-11-01), Gordon
patent: 5069156 (1991-12-01), Suzuki
patent: 5070813 (1991-12-01), Sakai et al.
patent: 5116250 (1992-05-01), Sago et al.
Bornside et al., "Spin coating: One-dimensional model," Journal of Applied Physics, 66(11):5185-5193, Dec. 1, 1989.
Bornside et al., "On the Modeling of Spin Coating," Journal of Imaging Technology, vol. 13, 4:122-130, Aug. 1987.
Bornside et al., "Spin Coating of a PMMA/Chlorobenzene Solution," Journal of the Electrochemical Society, vol. 138, 1:317-320, Jan. 1991.
Chen, "Investigation of the Solvent-Evaporation Effect on Spin Coating of Thin Films," Polymer Engineering and Science, vol. 23, 7:399-403, May 1983.
Clarkson et al., "Visualization of Flow Instabilities on a Rotating Disk," AIAA Journal, vol. 18, 1541-1543, Dec. 1980.
Crooks et al., "Generation of Radial Striations on Particulate Coated Magnetic Disks," IEEE Transactions on Magnetics, vol. Mag 23, 5:3146-3148, Sep. 1987.
Daughton et al., "An Investigation of the Thickness Variation of Spun-on Thin Films Commonly Associated with the Semiconductor Industry," Journal of Electrochem. Soc., vol. 129, 1:173-179, Jan. 1982.
Elliot, "Photoresist Coating," Softbake, Integrated Circuit Fabrication Technology, Chpts 6 and 7, 125-163, 1982. (no month date).
Ellison, "Mass Transfer to a Rotating Disk," Journal of Electrochem. Soc., 18:68-72, Jan. 1971.
Emslie et al., "Flow of a Viscous Liquid on a Rotating Disk," Journal of Applied Physics, vol. 29, 5:858-862, May 1958.
Fedorov et al., "Transitional Flow Conditions on a Rotating Disk," Journal of Engineering Physics, vol. 31, 1448-1453, Dec. 1976.
Flack et al., "A Mathematical Model for Spin Coating of Polymer Resists," Journal of Applied Physics, vol. 56, 4:1199-1206, Aug. 15, 1984.
Kobayashi et al., "Spiral Vortices in Boundary Layer Transition Regime on a Rotating Disk," ACTA Mechanica, 35:71-82, 1980. (no month date).
Kohama et al., "AIAA-87-1340 Crossflow Instability in Rotating Disk Boundary-Layer," AIAA 19th Fluid Dynamics, Plasma Dynamics and Lasers Conference, 1-6, Jun. 8-10, 1987, Honolulu, Hawaii.
Kohama et al., "Study on Boundary Layer Transition of a Rotating Disk," Acta Mechanica, 50:193-199, 1984. (no month date).
Kreith et al., "Heat and Mass Transfer from a Rotating Disk," Journal of Heat Transfer, 81:95-105, May 1959.
Lai et al., "An Investigation of Spin Coating of Electron Resists," Polymer Engineering and Science, vol. 19, 15:1117-1121, Nov. 1979.
Malik et al., "Instability and Transition in Rotating Disk Flow," AIAA Journal, vol. 19, 9:1131-1138, Sep. 1981.
Malik et al., "The Neutral Curve for Stationary Disturbances in Rotating-Disk Flow," J. Fluid. Mech., vol. 164, 275-287, 1986. (no month date).
Meyerhofer, "Characteristics of Resist Films Produced by Spinning," Journal of Applied Physics, vol. 49, 7:3993-3997, Jul. 1978.
Sirivat, "Stability Experiment of Flow Between a Stationary and a Rotating Disk," Phys. Fluids A, vol. 3, 11:2664-2671, Nov. 1991.
Smith, "Exploratory Investigation of Laminar-Boundary-Layer Oscillations on a Rotating Disk, Technical Note No. 1227, " National Advisory Committee for Aeronautics, 1-15, May 1947.
Sparrow et al., "Heat Transfer from a Rotating Disk to Fluids of Any Prandtl Number," Journal of Heat Transfer, 81:249-251, Aug. 1959.
Sparrow et al., "Mass Transfer, Flow, and Heat Transfer About a Rotating Disk," Journal of Heat Transfer, 82:294-302, Nov. 1960.
Stuart et al., "On the Stability of Three-Dimensional Boundary Layers with Application to the Flow Due to a Rotating Disk," Price 17s. 6d., vol. 248, 20-199, Jul. 14, 1955.
Sukanek, "Spin Coating," Journal of Imaging Technology, vol. 11, 4:184-190, Aug. 1985.
Szeri et al., "Short Communication Stability of Flow Over a Rotating Disk," International Journal for Numerical Methods in Fluids, vol. 4, 989-996, 1984. (no month date).
Wilkinson et al., "Stability Experiments in the Flow over a Rotating Disk," AIAA Journal, vol. 23, 4:588-595, Apr. 1985.
Bornside David E.
Brown Robert A.
Bareford Katherine A.
Beck Shrive
Massachusetts Institute of Technology
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