4. Coating processes
  5. Centrifugal force utilized

David E. Bornside

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Control system with filtered dead zone

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Specific compensation or stabilization feature
Reexamination Certificate

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Method for low pressure spin coating and low pressure spin coati

Coating processes – Centrifugal force utilized
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Profile ID: LFUS-PAI-P-267923

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