Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2003-07-24
2008-10-28
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S309000, C250S311000, C250S288000, C250S282000, C250S310000, C977S863000, C977S860000, C977S849000, C977S726000, C356S073000
Reexamination Certificate
active
07442922
ABSTRACT:
The invention relates to a combined method in which a high-resolution image of a sample surface is recorded by means of scanning force microscopy and the locally high-resolution, chemical nature (which is correlated with this) of the sample surface is measured by means of mass spectroscopy. The surface is chemically analyzed on the basis of laser desorption of a restricted surface area. For this purpose, the surface is illuminated in a pulsed form at each point of interest using the optical near-field principle. The optical near-field principle guarantees analysis with a position resolution which is not diffraction-limited. A hollow tip of the measurement probe that is used allows unambiguous association between the chemical analysis and a selected surface area. The highly symmetrical arrangement allows good transmission of the molecular ions that are produced.
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Amrein Matthias
Dreisewerd Klaus
Knebel Detlef
Berman Jack I.
JPK Instruments AG
Logie Michael J
Smith Patent Office
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