Method for isolating a failure site in a wordline in a...

Details Method for isolating a failure site in a wordline in a... Method for isolating a failure site in a wordline in a...

2008-01-15

2008-01-15

Nguyen, Viet Q. (Department: 2827)

Static information storage and retrieval

Read/write circuit

Testing

C714S718000, C714S720000

Reexamination Certificate

active

10981026

ABSTRACT:
According to one exemplary embodiment, a method for isolating a failure site in a leaky wordline in a memory array includes dividing said leaky wordline into an initial leaky wordline portion and an initial non-leaky wordline portion, where the initial leaky wordline portion has wordline-to-substrate leakage. The initial leaky wordline portion can be determined by using a passive voltage contrast procedure to illuminate the initial leaky wordline portion. The method further includes performing a number of division and identification cycles on the initial leaky wordline portion to determine a final leaky wordline portion. According to this exemplary embodiment, the final leaky wordline portion comprises a predetermined number of memory cells. The method further includes performing a cutting and imaging procedure on the final leaky wordline portion to isolate the failure site.

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