Method for inspecting defect and system therefor

Details Method for inspecting defect and system therefor Method for inspecting defect and system therefor

2006-03-07

2006-03-07

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S035000, C702S083000

Reexamination Certificate

active

07010447

ABSTRACT:
Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.

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