Method for inspecting and measuring sample and scanning...

Details Method for inspecting and measuring sample and scanning... Method for inspecting and measuring sample and scanning...

2011-06-14

2011-06-14

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

07960696

ABSTRACT:
As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first electron beam to a sample to charge the sample are proposed wherein the beam diameter of the first electron beam is made larger than the beam diameter of the second electron beam.

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