Method for increasing the measurement information available...

Details Method for increasing the measurement information available... Method for increasing the measurement information available...

2005-03-08

2005-03-08

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S307000

Reexamination Certificate

active

06864483

ABSTRACT:
This invention relates to a method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of: including, in said transmission electron microscope, an atomic force microscopy device. This invention also relates to a transmission electron microscopy device, characterised in that a transmission electron microscope is combined with an atomic force microscope, positioned within said transmission electron microscope. Finally, the invention relates to a device for insertion in a transmission electron microscope, characterised in that said device comprises an atomic force microscopy device.

REFERENCES:
patent: 5552602 (1996-09-01), Kakibayashi et al.
patent: 5739425 (1998-04-01), Binnig et al.
patent: 5811804 (1998-09-01), Van Blitterswijk et al.
patent: 6242737 (2001-06-01), Ohnishi et al.
patent: 0665417 (1992-08-01), None
patent: 6117847 (1994-04-01), None
patent: 60-129847 (1994-05-01), None
Memmert et al. (“Combined Ultrahigh Vacuum Scanning Tunneling Microscope Scanning Electron Microscope System” Review of Scientific Instruments, vol. 67, No. 6, Jun. 1, 1996, pp. 2269-2273).

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