Method for increasing the area of non-polar and semi-polar...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C257S615000

Reexamination Certificate

active

08080469

ABSTRACT:
A method for fabricating a high quality freestanding nonpolar and semipolar nitride substrate with increased surface area, comprising stacking multiple films by growing the films one on top of each other with different and non-orthogonal growth directions.

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Shao, Y-P. et al., “Electrical Characterization of Semipolar Gallium Nitride Thin Films,” NNIN REU Research Accomplishments, Aug. 2005, pp. 132-133.
International Search Report mailed Dec. 5, 2008, International application No. PCT/US2008/077072, International filing date Sep. 19, 2008.

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