Coating processes – Measuring – testing – or indicating
Patent
1994-02-04
1996-05-28
Padgett, Marianne
Coating processes
Measuring, testing, or indicating
4272481, 4272551, 73196, 73199, 7386142, 7386149, C23C 1600, G01F 134, G01F 700
Patent
active
055209696
ABSTRACT:
The flow of a liquid reagent gas into a vapor deposition process chamber is adjusted in response to control information provided by a process controller. The controller executes a prescribed mathematical algorithm which utilizes first and second steady-state pressure differentials. The first pressure differential is measured during the flowing of a carrier gas into the chamber. The second pressure differential is measured after the release of the liquid reagent into the chamber.
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Nishizato Hiroshi
Sivaramakrishnan Visweswaren
Zhao Jun
Applied Materials Inc.
Padgett Marianne
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