Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-06-06
1991-07-16
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156649, 156651, 1566591, 156662, 350 9612, H01L 21306, B44C 122
Patent
active
050322192
ABSTRACT:
A method, and device produced therewith, for improving the planarity of etched mirror facets 18 of integrated optic structures with non-planar stripe waveguides, such as ridge or groove diode lasers or passive devices such as modulators and switches. The curvature of the mirror facet surface at the edges of the waveguide due to topographical, lithographical and etch process effects, causes detrimental phase distortions, and is avoided by widening the waveguide end near the mirror surface thereby shifting the curved facet regions away from the light mode region to surface regions where curvature is not critical.
REFERENCES:
IEEE Journal of Quantum Electronics, vol. QE-23, No. 8, Aug. 1987, pp. 1283-1286; J. Chen. S. Lee, "AlGaAs/GaAs Visible Ridge Waveguide Laser with Multicavity Structure".
IEEE Journal of Quantum Electronics, vol. QE-23, No. 3, Mar. 1987, pp. 309-312; L. D. Zhu et al., "Low Threshold Ridge Waveguide Single Quantum Well Laser Processed by Chemically Assisted Ion Beam Etching".
Buchmann Peter L.
Vettiger Peter
Voegeli Otto
Webb David J.
Boles Donald M.
International Business Machines - Corporation
Powell William A.
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