Method for improving the imaging properties of at least two...

Details Method for improving the imaging properties of at least two... Method for improving the imaging properties of at least two...

2005-11-08

2005-11-08

Epps, Georgia (Department: 2873)

Optical: systems and elements

Polarization without modulation

Depolarization

C359S490020, C359S900000, C355S053000, C355S071000

Reexamination Certificate

active

06963449

ABSTRACT:
A method for improving imaging properties of two or more optical elements comprises the step of determining for at least one of the two optical elements a polarization-dependent perturbation. In a further step a polarization-independent perturbation is determined for at least one of the two optical elements. Then a target position for the at least one movable optical element is calculated such that, in the target position, the total perturbation of the at least two optical elements which is made up of the polarization-dependent perturbations and polarization-independent perturbations of the two optical elements, is minimized. Finally the at least one movable optical element is moved the to the calculated target position.

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Merkel et al., entited “The development of microlithographic high-performance optics,” published by International Journal of Optoelectronics, 1989, vol. 4, No. 6, pp. 545-562.

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