Method for improving the imaging properties of a projection...

Details Method for improving the imaging properties of a projection... Method for improving the imaging properties of a projection...

2005-09-08

2008-11-25

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000

Reexamination Certificate

active

07456933

ABSTRACT:
In a method for improving the imaging properties of a projection objective of a microlithographic projection exposure apparatus, an appropriate illumination angle distribution adapted to a mask (24; 224) to be projected is selected. Then locations (40a,40b;60a,60b;80a,80b,80c) in an exit pupil of the projection objective (20), which are illuminated under these conditions by projection light during a projection of the mask, are determined. For at least one image point, an actual value of an imaging quantity, e.g. a wavefront profile or a polarization state, is determined that influences the imaging properties of the projection objective. Finally, corrective measures are calculated such that the actual value of the imaging quantity approximates a desired value at these locations. In this last step, however, deviations of the actual value from the desired value are taken into account exclusively at said locations illuminated in the exit pupil.

REFERENCES:
patent: 5337097 (1994-08-01), Suzuki et al.
patent: 6285443 (2001-09-01), Wangler et al.
patent: 6429440 (2002-08-01), Bleeker
patent: 2002/0001088 (2002-01-01), Wegmann et al.
patent: 2003/0016339 (2003-01-01), Taniguchi
patent: 2004/0114150 (2004-06-01), Wegmann et al.
patent: 2004/0145714 (2004-07-01), Poultney
patent: 2004/0145806 (2004-07-01), Hoffman et al.
patent: 2005/0018278 (2005-01-01), Ozawa
patent: 2005/0146704 (2005-07-01), Gruner et al.
patent: 103 04 822 (2004-02-01), None
patent: 8-234138 (1996-09-01), None

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