Method for improving selectivity of electroless metal...

Details Method for improving selectivity of electroless metal... Method for improving selectivity of electroless metal...

2007-05-29

2007-05-29

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S678000, C257SE21537

Reexamination Certificate

active

10459131

ABSTRACT:
A method of depositing a metal cladding on conductors in a damascene process is described. The potential between, for instance, cobalt ions in electroless solution and the surface of an ILD between the conductors is adjusted so as to repel the metal from the ILD.

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