Method for improving an optical imaging property of a...

Details Method for improving an optical imaging property of a... Method for improving an optical imaging property of a...

2007-06-05

2007-06-05

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000, C355S062000

Reexamination Certificate

active

11149568

ABSTRACT:
A method is disclosed for improving an optical imaging property, for example spherical aberration or the focal length, of a projection objective of a microlithographic projection exposure apparatus. First, an immersion liquid is introduced into an interspace between a photosensitive surface and an end face of the projection objective. Then an imaging property of the projection objective is determined, for example using an interferometer or a CCD sensor arranged in an image plane of the projection objective. This imaging property is compared with a target imaging property. Finally, the temperature of the immersion liquid is changed until the determined imaging property is as close as possible to the target imaging property.

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International Search Report, International Application PCT/EP 03/01564, dated Oct. 13, 2004.

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