Method for image reconstruction in a high-resolution electron mi

Radiant energy – Inspection of solids or liquids by charged particles – Methods

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250311, H01J 3726

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054323479

ABSTRACT:
A method for image reconstruction in a high-resolution electron microscope. The Fourier transform (29) of an electron hologram (28) is obtained which is composed of a central frequency domain CB=I.sub.hol,0 (G) and two sidebands SB+=I.sub.hol,+ (G) and SB-=I.sub.hol,- (G). The two sidebands represent the linear image information. By making use of the frequencies in the central frequency domain in the image reconstruction, a non-linear image reconstruction is performed having a resolution which is considerably higher than the achievable information limit in linear image reconstruction using only the sidebands.

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H. Lichte, Electron image Plne Off-axis Holography of Atomic Structures, Advances in Optical and Electron Microscopy vol. 12, 26-91, 1991.

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