Method for identifying surface atoms of solid sample and apparat

Details Method for identifying surface atoms of solid sample and apparat Method for identifying surface atoms of solid sample and apparat

1996-03-13

1997-06-03

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, 378 44, H01J 3726

Patent

active

056357168

ABSTRACT:
The atoms constituting a surface of a solid sample are identified by first forming, on the surface, island-like deposits of a substance capable of generating fluorescent X-rays upon being energized by an electron beam. The deposits are then energized with the electron beam so that fluorescent X-rays are emitted therefrom and reflected on the surface. From the critical angle for total reflection of the fluorescent X-rays reflected on that portion of the surface of the sample on which no deposits are present, the atoms constituting the surface may be determined. An apparatus for carrying out the above method is also disclosed which is a modification of the conventional RHEED/TRAXS device.

REFERENCES:
patent: 4746571 (1988-05-01), Kelly
patent: 5093573 (1992-03-01), Mikoshiba et al.
patent: 5369275 (1994-11-01), Usui et al.

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