Method for high temperature reaction process

Details Method for high temperature reaction process Method for high temperature reaction process

1989-11-16

1990-09-18

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156646, 156655, 156668, 156345, 20419236, B44C 122, C03C 1500, C03C 2506, B29C 3700

Patent

active

049575880

ABSTRACT:
A method for high temperature reaction process, including the steps of mounting a substrate on which a radiation-sensitive polymer film is formed on a lower heating plate in a reaction vessel, sealing the reaction vessel while positioning an upper heating plate to above the substrate, maintaining a temperature difference between temperatures of the lower heating plate and the upper heating plate within a predetermined range, and supplying a reactive compound into the reaction vessel.

REFERENCES:
patent: 4613398 (1986-09-01), Chiong et al.
patent: 4615765 (1986-10-01), Levinson et al.
patent: 4657845 (1987-04-01), Frechet et al.
patent: 4751170 (1988-06-01), Mimura et al.
patent: 4867838 (1989-09-01), Brooks et al.

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