Metal fusion bonding – Process – With condition responsive – program – or timing control
Patent
1998-04-29
2000-06-27
Ryan, Patrick
Metal fusion bonding
Process
With condition responsive, program, or timing control
228 11, 228 11, 2281101, B23K 106, B23K 520, B23K 2010, B23Q 1500, B23Q 1600
Patent
active
060796073
ABSTRACT:
A method of forming a ball weld during the fabrication of a semiconductor device wherein a pad (3) and a gold ball (9) to be bonded to the pad is provided over the pad. Ultrasonic energy from an ultrasonic energy source (11) is applied to the ball to soften the ball while concurrently applying a compressive force to the ball to force the ball against the pad. Reflections of the ultrasonic energy are monitored to provides an indication of completion of the bond of the ball to the pad from the application of energy and compressive force to the ball. The application of energy to the ball is terminated responsive to detecting a parameter which provides an indication of completion of the bond. A preferred embodiment of the step of detecting includes providing a piezoelectric device (13) providing a current output responsive to the reflections of said ultrasonic energy and providing a monitor (21) to detect from the current output the indication of completion of the bond. The step of terminating can include the step of terminating the step of applying energy or the step of removing the compressive force from the ball.
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Brady III Wade James
Ryan Patrick
Stoner Kiley
Telecky Jr. Frederick J.
Texas Instruments Incorporated
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