Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1992-11-13
1996-03-26
Mai, Ngoclan
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
210681, 210682, 134 13, 423 2, 423 22, 423 23, 423 87, 423 99, H01L 2100
Patent
active
055017673
ABSTRACT:
Silicon is employed as a reducing agent in an acid bath to adsorb noble metals present as contaminants in the acid. In the manufacture of silicon devices for electronic memory and other devices, polonium-210 is adsorbed by silicon getters to reduce soft error rate attributable to alpha particle emissions from the radioactive polonium. The noble metals in addition to polonium which can be plated onto silicon using the disclosed method are gold, silver, platinum, copper, palladium, mercury, selenium and bismuth.
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patent: 4804526 (1989-02-01), Hall et al.
patent: 4952386 (1990-08-01), Davison et al.
patent: 5120443 (1992-06-01), Bruening et al.
patent: 5164093 (1992-11-01), Chilton et al.
patent: 5277715 (1994-01-01), Cathey
Grieger Eric
Sorensen Troy
Collier Susan B.
Mai Ngoclan
Micro)n Technology, Inc.
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