Method for generating extreme ultraviolet with mather-type...

Details Method for generating extreme ultraviolet with mather-type... Method for generating extreme ultraviolet with mather-type...

2006-10-03

2006-10-03

Berman, Jack (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

Reexamination Certificate

active

07115887

ABSTRACT:
A device and method for generating extremely short-wave ultraviolet electromagnetic wave uses two intersecting plasma beams generated by two plasma accelerators. The intersection of the two plasma beams emits electromagnetic radiation and in particular radiation in the extreme ultraviolet wavelength. In the preferred orientation two axially aligned counter streaming plasmas collide to produce an intense source of electromagnetic radiation at the 13.5 nm wavelength. The Mather type plasma accelerators can utilize tin, or lithium covered electrodes. Tin, lithium or xenon can be used as the photon emitting gas source.

REFERENCES:
patent: 3997468 (1976-12-01), Maljushevsky et al.
patent: 4042848 (1977-08-01), Lee
patent: 4494043 (1985-01-01), Stallings et al.

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