Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1984-08-30
1985-10-15
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
29569L, 156656, 156657, 350 9612, 427 85, H01L 21306, C23F 102, B44C 122, G02B 514
Patent
active
045472629
ABSTRACT:
A thin film passive integrated optical waveguide is formed in a lithium tantalate substrate by proton exchange in a benzoic acid bath. Annealing the substrate provides increased waveguide depth and stabilizes the refractive index. Optical components are formed by proton exchange of the masked substrate after formation of a planar waveguide.
REFERENCES:
patent: 4087315 (1978-05-01), Auracher et al.
patent: 4115150 (1978-09-01), Dyment
Sanford Norman A.
Soref Richard A.
Spillman, Jr. William
Albin Arnold L.
Powell William A.
Sperry Corporation
Terry Howard P.
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