Method for forming thin film passive light waveguide circuit

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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29569L, 156656, 156657, 350 9612, 427 85, H01L 21306, C23F 102, B44C 122, G02B 514

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045472629

ABSTRACT:
A thin film passive integrated optical waveguide is formed in a lithium tantalate substrate by proton exchange in a benzoic acid bath. Annealing the substrate provides increased waveguide depth and stabilizes the refractive index. Optical components are formed by proton exchange of the masked substrate after formation of a planar waveguide.

REFERENCES:
patent: 4087315 (1978-05-01), Auracher et al.
patent: 4115150 (1978-09-01), Dyment

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