Fishing – trapping – and vermin destroying
Patent
1994-06-07
1996-02-27
Breneman, R. Bruce
Fishing, trapping, and vermin destroying
437235, 437238, H01L 21469
Patent
active
054948584
ABSTRACT:
This invention provides a process for making a semiconductor device with reduced capacitance between adjacent conductors. This process can include applying and gelling one or more solutions between and over conductors 24 and drying the wet gel to create at least porous dielectric sublayers 28 and 29. By varying the composition of the solutions, gelling conditions, drying temperature, composition of the solvents in the wet gel, or a combination of these approaches, the porosity of the sublayers may be tailored individually. A non-porous dielectric layer 30 may be formed over porous layer 28, which may complete an interlayer dielectric. A novel process for creating the porous dielectric layer is disclosed, which can be completed at vacuum or ambient pressures, yet results in porosity, pore size, and shrinkage of the dielectric during drying comparable to that previously attainable only by drying gels at supercritical pressure.
REFERENCES:
patent: 4652467 (1987-03-01), Brinker et al.
patent: 4987101 (1991-01-01), Kaanta et al.
patent: 5103288 (1992-04-01), Sakamoto et al.
patent: 5155576 (1992-10-01), Mizushima
patent: 5393712 (1995-02-01), Rostoker et al.
Cho Chih-Chen
Gnade Bruce E.
Smith Douglas M.
Breneman R. Bruce
Donaldson Richard L.
Harris James E.
Stoltz Richard A.
Texas Instruments Incorporated
LandOfFree
Method for forming porous composites as a low dielectric constan does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for forming porous composites as a low dielectric constan, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming porous composites as a low dielectric constan will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1678990