Method for forming electrode on diamond for electronic devices

Details Method for forming electrode on diamond for electronic devices Method for forming electrode on diamond for electronic devices

1997-06-09

1999-02-09

Trinh, Michael

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438105, 430311, 148DIG100, 148DIG148, H01L 2144, H01L 2100

Patent

active

058693904

ABSTRACT:
Disclosed is a method of forming electrodes on diamond comprising the steps of: forming a mask pattern on diamond or diamond film; performing a treatment of the diamond surface by a plasma of inert gases; forming an electrode film on the whole surface of the specimen; and removing the mask, thereby forming a specified pattern of the electrodes. By this method, it is possible to form electrodes having high adhesion to diamond and diamond film for electronic devices.

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