Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1986-12-29
1989-06-27
Childs, Sadie
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
156646, 427255, 4272553, 427307, 427309, 437225, 437228, 437234, C23C 1600
Patent
active
048428973
ABSTRACT:
A method for forming deposited film by introducing into a reaction space a gaseous starting material for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action for said starting material to effect chemical contact therebetween to thereby form a plural number of precursors including precursors under excited state, and forming said deposited film on a substrate previously position in a film forming space spatially communicated with said reaction space with the use of at least one precursor of these precursors as the feeding source for the constituent element of said deposited film, said method comprising the step of increasing the proportion of the amount of said gaseous starting material introduced relative to the amount of said gaseous halogenic oxidizing agent introduced in said reaction space.
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Hanna Jun-ichi
Hirooka Masaaki
Sakai Akira
Shimizu Isamu
Takeuchi Eiji
Canon Kabushiki Kaisha
Childs Sadie
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