Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1984-05-07
1985-12-10
Bernstein, Hiram H.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
C30B 2504
Patent
active
045577943
ABSTRACT:
A method for forming a layer of monocrystalline diamond cubic material on a mask comprises initially providing a substrate having a monocrystalline surface which is parallel to a {100}-type crystallographic plane. A mask is then formed on the substrate, the mask including at least two apertures and each aperture including an edge which is oriented between 8.degree. and 14.degree. from a particular <001> direction on the surface. The aperture edges are mutually parallel and in mutual opposition and the mask apertures each expose a monocrystalline surface portion of the substrate. The diamond cubic material is then epitaxially grown through the apertures and over the mask so as to form a monocrystalline layer of substantially uniform quality overlying the mask between the edges of the apertures.
REFERENCES:
patent: 3951694 (1976-04-01), Monfret
patent: 4522662 (1985-06-01), Bradbury et al.
"Growth Process of Silicon Over SiO.sub.2 by CVD: Epitaxial Lateral Overgrowth Technique", L. Jastrzebski et al., Journal of Electrochemical Society, vol. 130, No. 7, pp. 1571-1580, Jul. 1983.
"Defect Characterization in Monocrystalline Silicon Grown Over SiO.sub.2 ", J. T. McGinn et al., Journal of Electrochemical Society, vol. 131, No. 2, pp. 398-403, Feb. 1984.
"Growth Rate Anisotropy and Morphology of Autoepitaxial Silicon Films from SiCl.sub.4 ", C. H. J. Van Den Brekel, Journal of Crystal Growth, vol. 23, pp. 259-266, 1974.
International Publication No. WO81/02948, "Methods of Producing Sheets of Crystalline Material and Devices Made Therefrom", MIT, published Oct. 15, 1981.
Corboy, Jr. John F.
Jastrzebski Lubomir L.
McGinn Joseph T.
Bernstein Hiram H.
Cohen Donald S.
Glick Kenneth R.
Morris Birgit E.
RCA Corporation
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