Method for forming a planar mirror using a sacrificial oxide

Details Method for forming a planar mirror using a sacrificial oxide Method for forming a planar mirror using a sacrificial oxide

2007-09-25

2007-09-25

McPherson, John A. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C430S319000, C216S024000

Reexamination Certificate

active

10909074

ABSTRACT:
A micro electromechanical system (MEMS) mirror, comprising a displaceable hinged member, a mirror plate, and a plurality of mirror support elements. The mirror plate has a planar mirror face affixed thereto. The plurality of mirror support elements extend between the displaceable hinged member and the mirror plate.

REFERENCES:
patent: 2005/0162727 (2005-07-01), Ishii et al.
patent: WO 02/12925 (2006-02-01), None

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