Method for forming a passivated metal layer

Details Method for forming a passivated metal layer Method for forming a passivated metal layer

2007-03-13

2007-03-13

Chen, Bret (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

Metal coating

C427S250000, C427S255290, C427S255310, C427S255394, C427S255700, C427S383100

Reexamination Certificate

active

10711717

ABSTRACT:
A method for forming a passivated metal layer that preserves the properties and morphology of an underlying metal layer during subsequent exposure to oxygen-containing ambients. The method includes providing a substrate in a process chamber, exposing the substrate to a process gas containing a rhenium-carbonyl precursor to deposit a rhenium metal layer on the substrate in a chemical vapor deposition process, and forming a passivation layer on the rhenium metal layer to thereby inhibit oxygen-induced growth of rhenium-containing nodules on the rhenium metal surface.

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International Search Report and Written Opinion, European Patent Office, Issued Jan. 25, 2006, 9 pp.

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