Fishing – trapping – and vermin destroying
Patent
1994-03-24
1995-01-31
Quach, T. N.
Fishing, trapping, and vermin destroying
437189, 437192, 437194, 437228, 437229, H01L 21283, H01L 2131
Patent
active
053858670
ABSTRACT:
After accumulating a BPSG film layer on a silicon substrate, a first Al--Si--Cu film layer, a W film layer and a second Al--Si--Cu film layer are successively accumulated on this BPSG film layer. A resist pattern with wide-width and narrow-width pattern portions is formed on the second Al--Si--Cu film layer. The wide-width pattern portion is provided at a position corresponding to a contact for connecting a first-layer metallic wiring and a second-layer metallic wiring, while the narrow-width pattern portion is provided at a position corresponding to a wiring portion for the first-layer metallic wiring. After applying first etching on the second Al--Si--Cu film layer with a mask of the resist patter, second etching is applied on the W film layer. Thereafter, by applying third etching, the resist pattern remaining on the first-layer metallic wiring is removed and the first Al--Si--Cu film layer is transfigured into a tall metallic film portion and a short metallic film portion. After accumulating an inter-layer insulating film layer on the first Al--Si--Cu film layer, etchback is applied on this inter-layer insulating film layer until the top of the tall metallic film portion is bared. Then, the second-layer metallic wiring is formed on the inter-layer insulating film layer so that the second-layer metallic wiring is connected with the tall metallic film portion.
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Hirao Shuji
Murakami Tomoyasu
Nomura Noboru
Ueda Tetsuya
Yamanaka Michinari
Matsushita Electric - Industrial Co., Ltd.
Quach T. N.
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