Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With measuring – testing – or sensing
Patent
1996-03-02
1999-01-26
Martin, Roland
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
With measuring, testing, or sensing
205667, B23H 300, B23H 914, C25F 302
Patent
active
058634118
ABSTRACT:
A method for forming a minute pattern in a metal workpiece, comprising the steps of forming a mask pattern on the metal workpiece and electro-chemically etching the metal workpiece. The workpiece is electro-chemically etched in a electrolyte bath following formation of the mask pattern.
REFERENCES:
patent: 4045312 (1977-08-01), Satoshi
patent: 4629539 (1986-12-01), Imai
patent: 4755257 (1988-07-01), Yamamoto et al.
patent: 5183725 (1993-02-01), Nishino et al.
patent: 5286355 (1994-02-01), Fainchtein et al.
Baek Doo-heun
Kang Seung-oun
Moon Sang-young
Suh Won-chae
Martin Roland
Samsung Electronics Co,. Ltd.
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