Method for forming a hard carbon thin film on article and applic

Details Method for forming a hard carbon thin film on article and applic Method for forming a hard carbon thin film on article and applic

1986-04-17

1988-02-16

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

20419211, 20419215, 427 38, 427 39, 427 41, 428408, C23C 1400

Patent

active

047253452

ABSTRACT:
A method of forming diamond-like carbon layer which is advantageously adaptable as a coating layer on acoustic diaphragms. In the method, carbon vaporized out of solid carbon source is deposited onto the surface of the diaphragm as the coating layer in the atmosphere of catalystic gas, for instance, H.sub.2 +Ar or H.sub.2 of about 10.sup.-4 Torr. The deposited carbon layer on the surface of the diaphragm is an amorphous carbon of inclusion of hybridized orbital SP.sup.2 bond and hybridized orbital SP.sup.3 bond and crystalline carbon particles of hybridized orbital SP.sup.3 bond dispersed in the amorphous carbon, or an amorphous carbon of inclusion of hybridized orbital SP.sup.2 bond and hybridized orbital SP.sup.3 bond.

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Banks et al., Jvac Sci. Technol. 21(3), 1982, pp. 807-814.

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