Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2006-05-02
2006-05-02
Nelms, David (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S256000, C257S285000, C438S135000, C438S268000
Reexamination Certificate
active
07038272
ABSTRACT:
In a method for forming a channel zone in field-effect transistors, a polysilicon layer is patterned above the channel zone to be formed. The polysilicon layer serves as a mask substrate for the subsequent doping of the channel zone. The expedient patterning of the polysilicon layer with holes in a gate region and pillars in a source region enables the channel zone to be doped more lightly. In another embodiment, the novel method is used for a channel width shading of a PMOS transistor cell.
REFERENCES:
patent: 5736445 (1998-04-01), Pfirsch
patent: 5879968 (1999-03-01), Kinzer
patent: 6274904 (2001-08-01), Tihanyi
patent: 6794251 (2004-09-01), Blanchard
patent: 2 319 395 (1998-05-01), None
Ahlers Dirk
Tihanyi Jenö
Wahl Uwe
Weber Hans
Willmeroth Armin
Greenberg Laurence A.
Infineon - Technologies AG
Locher Ralph E.
Nelms David
Nguyen Dao H.
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