Method for forming a channel zone of a transistor and NMOS...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S256000, C257S285000, C438S135000, C438S268000

Reexamination Certificate

active

07038272

ABSTRACT:
In a method for forming a channel zone in field-effect transistors, a polysilicon layer is patterned above the channel zone to be formed. The polysilicon layer serves as a mask substrate for the subsequent doping of the channel zone. The expedient patterning of the polysilicon layer with holes in a gate region and pillars in a source region enables the channel zone to be doped more lightly. In another embodiment, the novel method is used for a channel width shading of a PMOS transistor cell.

REFERENCES:
patent: 5736445 (1998-04-01), Pfirsch
patent: 5879968 (1999-03-01), Kinzer
patent: 6274904 (2001-08-01), Tihanyi
patent: 6794251 (2004-09-01), Blanchard
patent: 2 319 395 (1998-05-01), None

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