Method for flip chip bonding by utilizing an interposer with...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor

Reexamination Certificate

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C438S107000

Reexamination Certificate

active

07098071

ABSTRACT:
The present invention relates to a method for flip chip bonding by utilizing an interposer with embedded bumps. The method comprises (a) providing a first element having a first surface; (b) forming an interposer onto the first surface; (c) forming a plurality of openings on the interposer; (d) forming a plurality of bumps in the openings, wherein the height of the bumps is smaller than the depth of the openings; (e) providing a second element having a plurality of pre-solders; and (f) bonding the first surface onto the second element, so that the pre-solders are disposed in the openings and in contact with the bumps. As a result, the self-alignment between the pre-solders and the bumps can avoid the shift between the first element and the second element.

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patent: 6566234 (2003-05-01), Capote et al.
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patent: 2002/0042164 (2002-04-01), Funaya et al.
patent: 2004/0197979 (2004-10-01), Jeong et al.

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