Method for fine-line interferometric lithography

Details Method for fine-line interferometric lithography Method for fine-line interferometric lithography

1992-09-16

1995-05-16

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430 1, 430394, 430397, 430945, 430952, 2504921, G03F 720

Patent

active

054158354

ABSTRACT:
In microelectronic processing, the method of producing complex, two-dimensional patterns on a photosensitive layer with dimensions in the extreme submicron range. A photosensitive layer is first exposed to two beams of coherent radiation to form an image of a first interference pattern on the surface of the layer. The layer is subsequently exposed to one or more interference pattern(s) that differ from the first interference pattern in some way, such as by varying the incident angle of the beams, the optical intensity, the periodicity, rotational orientation, translational position, by using complex amplitude or phase masks in one or both of the coherent beams, or a combination of the above. Desired regions of the complex pattern thus produced are isolated with a further exposure of the photosensitive layer using any conventional lithography.

REFERENCES:
patent: 3591252 (1971-07-01), Lu
patent: 4402571 (1983-09-01), Cowan
patent: 4859548 (1989-08-01), Herse
patent: 4997747 (1991-03-01), Yoshida
patent: 5208123 (1993-05-01), Ramsbottom
Zhou: "Precise Periodicity Control in the Fabrication of Holographic Gratings" in Appl. Optics, 20(8), Apr. 1981, pp. 1270-1272.

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