Etching a substrate: processes – Forming or treating thermal ink jet article
Patent
1997-10-30
2000-03-14
Cain, Edward J.
Etching a substrate: processes
Forming or treating thermal ink jet article
216 39, 216 56, B11B 527
Patent
active
060368748
ABSTRACT:
A method for forming a nozzle structure, as may be used in an ink-jet printer head, including first forming a layer of mold material on a substrate. The layer of mold material is shaped into a mold using photolithography and at least one etching step. A layer of nozzle material is then formed over the shaped mold material and the substrate. An aperture is formed through the nozzle material to the mold material, and the mold material is removed, leaving a chamber within the mold material; the chamber and aperture forming a nozzle structure.
REFERENCES:
patent: 5752303 (1998-05-01), Thiel
Applied Materials Inc.
Cain Edward J.
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