Metal treatment – Process of modifying or maintaining internal physical... – Processes of coating utilizing a reactive composition which...
Patent
1997-07-18
1998-12-29
Wyszomierski, George
Metal treatment
Process of modifying or maintaining internal physical...
Processes of coating utilizing a reactive composition which...
148284, 148537, 4271263, B05D 512
Patent
active
058535004
ABSTRACT:
A liquid precursor containing barium, strontium, and titanium, is applied to a first electrode, dried in air at a first temperature of 160.degree. C. and then a second temperature of 400.degree. C., and annealed at a temperature of 800.degree. C. in nitrogen to form a thin film of barium strontium titanate. A second electrode is deposited and then the device is patterned to form a capacitor, and a second anneal is performed at a temperature of 800.degree. C. in nitrogen. In this manner, a high electronic quality thin film of barium strontium titanate is fabricated without a high-temperature oxygen anneal.
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ASM Handbook, vol. 4, Heat Treating, pp. 542-567, "Furnace Atmospheres," ASM, 1991.
Joshi Vikram
Paz De Araujo Carlos A.
Symetrix Corporation
Wyszomierski George
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