Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Patent
1987-07-21
1989-04-04
Dees, Jose G.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
430321, 430323, 430324, 204 15, G03C 500
Patent
active
048186619
ABSTRACT:
A method of fabricating a free-standing wire mesh grid pattern having a sth, flat surface is disclosed. A thermal oxide is selectively applied to front and back sides of a silicon substrate. A central portion of the oxide on the back side is removed. A resist layer is applied onto the oxide on the front side of the substrate. A resist mesh pattern with a border encompassing that resist mesh pattern is lithographically developed on the resist layer. Chrome and gold layers are sequentially deposited onto the border and into the resist mesh pattern to create a wire mesh pattern within the resist mesh pattern. The resist layer, including the developed resist mesh pattern, is removed to expose the wire mesh pattern from the front side of the substrate. A nickel layer is deposited over the gold layer to develop a wider wire mesh pattern. A second gold layer is then deposited over the nickel layer to form a wire mesh grid pattern composed of chrome, gold, nickel and gold layers. Central portions of the substrate and the oxide on the front side of the substrate are removed to expose the wire mesh grid pattern from the back side of the substrate. Finally, the chrome layer is removed to produce the desired free-standing wire mesh grid pattern supported by the encompassing metal-clad border.
REFERENCES:
patent: 2961746 (1960-11-01), Lyman
patent: 3953303 (1976-04-01), Kamada et al.
patent: 4118288 (1978-10-01), Ruckl
Fischer Jacqueline
Grossman Julius
Peckerar Martin C.
Rebbert Milton L.
Smith Howard A.
Dees Jos,e G.
Jameson George
McDonnell Thomas E.
The United States of America as represented by the Secretary of
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