Method for fabricating semiconductor memory device

Details Method for fabricating semiconductor memory device Method for fabricating semiconductor memory device

2006-12-28

2010-11-30

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S635000, C257SE21495, C257SE21582

Reexamination Certificate

active

07842603

ABSTRACT:
A method for fabricating a semiconductor memory device includes forming an insulation layer including a contact plug over a substrate structure, forming a metal line structure over the insulation layer, the metal line structure including a patterned diffusion barrier layer and a metal line and contacting the contact plug, and oxidizing a surface of the metal line to form a passivation layer over the metal line.

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