Method for fabricating Schottky barrier tunnel transistor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having schottky gate

Reexamination Certificate

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C257SE29148

Reexamination Certificate

active

07863121

ABSTRACT:
A Schottky barrier tunnel transistor includes a gate electrode, and source and drain regions. The gate electrode is formed over a channel region of a substrate to form a Schottky junction with the substrate. The source and drain regions are formed in the substrate exposed on both sides of the gate electrode.

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L.E. Calvet et al., “Supression of leakage current in Schottky barrier metal-oxide-semiconductor field-effect transistors”, Journal of Applied Physics, vol. 91, No. 2, Jan. 15, 2002, 2002 American Institute of Physics (pp. 757-759).

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