Method for fabricating PLZT light valve device

Details Method for fabricating PLZT light valve device Method for fabricating PLZT light valve device

1987-07-17

1989-03-28

Dees, Jose G.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430311, 332 751, 350392, 357 72, G03C 500

Patent

active

048163813

ABSTRACT:
A method of fabricating a modulator panel for use in a light valve device, includes forming a metal pattern of spaced address electrode and pad portions on an ingress surface of the panel; heating the panel in a nitrogen atmosphere to remove moisture from the ingress surface; spin coating the ingress surface with a photoresist composition; and exposing and developing the photoresist coating so that the developed coating remains as a moisture impermeable layer, except over the electrode pad portions of the ingress surface.

REFERENCES:
patent: 3978578 (1976-09-01), Murphy
patent: 4068923 (1978-01-01), Toida
patent: 4158201 (1979-06-01), Smith et al.
patent: 4217160 (1980-08-01), Perregaux
patent: 4393130 (1983-07-01), Ho et al.
patent: 4422732 (1983-12-01), Ditzik

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