Method for fabricating microlenses

Details Method for fabricating microlenses Method for fabricating microlenses

1992-11-27

1994-05-10

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430323, 359642, 1566591, G03C 500

Patent

active

053106237

ABSTRACT:
A microlens of any designed configuration is formed as a replica in a photoresist material, and the photoresist material replica is used to reproduce the replica directly in a substrate material.

REFERENCES:
patent: 3932184 (1976-01-01), Cohen et al.
patent: 4279690 (1981-07-01), Dierschke
patent: 4427265 (1984-01-01), Suzuki et al.
patent: 4861140 (1989-08-01), Lucitte et al.
patent: 4877717 (1989-10-01), Suzuki et al.
patent: 4986633 (1991-01-01), Ohta
patent: 5139609 (1992-08-01), Fields et al.
patent: 5213916 (1993-05-01), Cronin et al.

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