Method for fabricating hybrid optical integrated circuit

Details Method for fabricating hybrid optical integrated circuit Method for fabricating hybrid optical integrated circuit

1987-04-02

1988-04-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156657, 1566591, 156662, 156663, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

047356774

ABSTRACT:
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a silicon substrate, an optical fiber and an optical device coupled optically to the optical waveguide, and an optical fiber guide and an optical device guide on the substrate for aligning the optical fiber and the optical device at predetermined positions, respectively, relative to the optical waveguide. Islands carrying electrical conductors are disposed on the substrate. A first electrical conductor film is formed on the substrate. Second electrical conductor films are formed on the top surfaces of the optical waveguide, the optical fiber guide, the optical device guide and the islands and are electrically isolated from the first electrical conductor film. An electrical conductor member is provided to feed electric power from the first and second electric conductor films to the optical device which needs the power supply. The optical waveguide, the optical fiber guide, the optical device guide and the islands are formed from the same high-silica glass optical waveguide film. Alignment of various portions is facilitated when assembling the circuit. A high coupling efficiency is realized with a low cost.

REFERENCES:
patent: 4169009 (1979-09-01), Wagner et al.
patent: 4326771 (1982-04-01), Henry et al.
patent: 4360246 (1982-12-01), Figueroa et al.
patent: 4547262 (1985-10-01), Spillman, Jr. et al.
"Taper Coupling between 7059-Glass and CDS Films and Phase Modulation in the Composite Waveguide Structure" by Applied Physics Letters, vol. 28, No. 3, Feb. 1, 1976.
"Optical Circuit and its Production," Patent Absts. of Japan, vol. 7, No. 54 (P-180) (1199) 3/4/83.
"Integrated-Optical Circuits Achieved by Planar Technology on Silicon Substrates: Application to the Optical Spectrum Analyser", vol. 131, No. 5, Old Woking, Survey GB; S. Valette et al., pp. 325-331.
"Fabrication of Flip-Chip Optical Couplers between Single Node Fibers and LiNbO.sub.3 Channel Waveguides," C. H. Bulmer et al; 31st Electronic Components Conf., Atlanta, Ga., May 11-13, 1981, pp. 109-113.
"Gallium Arsenide Laser-Array-on-Silicon Package"; J. D. Crow et al, Applied Optics, vol. 17, No. 3, Feb. 1, 1978, pp. 479-485.
"Flame Hydrolysis Deposition of SiO.sub.2 -TiO.sub.2 Glass Planar Optical Waveguides on Silicon", M. Kowachi et al., Japanese Journal of Applied Physics, vol. 22, No. 12 (1983) p. 1932.
Optical Fibre Coupling to High-Silica Channel Waveguides with Fibre-guiding grooves", Y. Yamada et al, Electronic Letters; vol. 20, No. 8, 4/12/84, pp. 313-314.
"Fabrication of a High Silica Glass Waveguide Optical Accessor," Yamada et al., Electronic Letters, vol. 20, No. 14, 7/5/84, pp. 589-591.
"Fabrication of SiO.sub.2 -TiO.sub.2 Glass Planar Optical Waveguides by Flame Hydrolysis Deposition", M. Kawachi et al., Electronics Letters, vol. 19, No. 15, 7/21/83, pp. 583-584.
Gloge "Optical Waveguide Transmission" Proceedings of the IEEE, vol. 58, No. 10, Oct. 1970.
Japanese Patent Application Laid-Open No. 57-84, 189 published May 26th, 1982, and abridged English language translation.
Japanese Patent Application No. 58-147,378 published Aug. 12th, 1983, and corresponding English language translation.

Affiliated with

Also associated with

Rating

Method for fabricating hybrid optical integrated circuit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for fabricating hybrid optical integrated circuit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating hybrid optical integrated circuit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2231829