Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
Reexamination Certificate
2005-08-23
2005-08-23
Thompson, Craig A. (Department: 2813)
Semiconductor device manufacturing: process
Formation of semiconductive active region on any substrate
Reexamination Certificate
active
06933213
ABSTRACT:
Provided is a compound semiconductor substrate fabrication method involving: preparing a base substrate; forming a first buffer layer on the prepared base substrate; forming a semiconductor layer on the first buffer layer; and removing the base substrate.
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Samsung Corning Co., Ltd.
Thompson Craig A.
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