Fishing – trapping – and vermin destroying
Patent
1992-12-31
1994-07-19
Breneman, R. Bruce
Fishing, trapping, and vermin destroying
156643, 437909, 148DIG11, H01L 2120, H01L 21306
Patent
active
053309324
ABSTRACT:
In one form of the invention, a method is disclosed for removing portions of successive layers of GaAs 34 and GaInP 32 comprising the steps of: performing an anisotropic reactive ion etch on the GaAs layer; and performing an isotropic wet etch on the GaInP layer, whereby a mesa formed as a result of the reactive ion etch and the wet etch has substantially vertical sidewalls, and further whereby GaInP/GaAs structures having dimensions of less than approximately 3.0 .mu.m may be fabricated.
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Fan Shou-Kong
Henderson Timothy S.
Hill Darrell G.
Liu William U.
Breneman R. Bruce
Fleck Linda J.
Kesterson James C.
Skrehot Michael K.
Texas Instruments Incorporated
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