Method for fabricating flat ROM devices using memory array cells

Details Method for fabricating flat ROM devices using memory array cells Method for fabricating flat ROM devices using memory array cells

1996-06-13

1997-07-29

Niebling, John

Fishing, trapping, and vermin destroying

437 48, H01L 21265

Patent

active

056521626

ABSTRACT:
A method of fabricating flat ROM devices, comprised of ROM memory array cells, with concave channels, has been developed. The concave channels allow greater channel lengths to be achieved, thus decreasing reliability risks arising from short channel lengths, however without increasing the size of the ROM device structure. This is accomplished by forming concave channel regions in an area in which a thermally grown field oxide region has been removed. This procedure also allows self-alignment of an N+ bit line region, to the concave channel region, to be realized.

REFERENCES:
patent: 4963504 (1990-10-01), Huang
patent: 5214303 (1993-05-01), Aoki
patent: 5300804 (1994-04-01), Arai
patent: 5448094 (1995-09-01), Hsu
patent: 5480819 (1996-01-01), Huang
patent: 5489543 (1996-02-01), Hong
patent: 5494843 (1996-02-01), Huang
patent: 5498556 (1996-03-01), Hong et al.
patent: 5510288 (1996-04-01), Hong
patent: 5516713 (1996-05-01), Hsue et al.
patent: 5541877 (1996-07-01), Shirai
patent: 5552329 (1996-09-01), Kim et al.

Affiliated with

Also associated with

Rating

Method for fabricating flat ROM devices using memory array cells does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for fabricating flat ROM devices using memory array cells, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating flat ROM devices using memory array cells will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-633232