Fishing – trapping – and vermin destroying
Patent
1994-02-01
1997-07-29
Breneman, R. Bruce
Fishing, trapping, and vermin destroying
437982, H01L 2131, H01L 21316
Patent
active
056521871
ABSTRACT:
The surface of a borophosphosilicate glass (BPSG) dielectric film undergoes a surface treatment, such as by plasma treatment with N.sub.2 O, N.sub.2 +NH.sub.3, N.sub.2, O.sub.2 or O.sub.3. Erosion caused by H.sub.2 SO.sub.4 boiling or by humidity absorption from the atmosphere is thereby reduced so that reflow processing at temperatures ideally below 850.degree. C. is possible and an interlayer dielectric film of excellent planarity is thus formed.
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Peter Lee, Maria Galiano, Peter Keswick, Jerry Wong, Bok Shin, David Wang; "Sub APCVD (SACVD) of Teos-O.sub.3 OSG & BPSG"; Th-0325-Jan. 1990 0000-0398C 1990 IEEE.
Ahn Yongchul
Chung U-in
Hong Chang-ki
Kim Changgyu
Breneman R. Bruce
Samsung Electronics Co,. Ltd.
Whipple Matthew
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