Method for fabricating capacitor array preventing crosstalk...

Details Method for fabricating capacitor array preventing crosstalk... Method for fabricating capacitor array preventing crosstalk...

2006-05-30

2006-05-30

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

Reexamination Certificate

active

07052967

ABSTRACT:
A capacitor array of a semiconductor device including a plurality of capacitors is provided. The capacitor array includes a plurality of lower electrodes, which are formed over a semiconductor substrate. A dielectric layer formed over the lower electrodes, and an upper electrode formed over the dielectric layer. The plurality of lower electrodes are insulated from each other either by an insulating layer having pores of a low dielectric constant, or by an air gap.

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Wolf and Tauber; Silicon Processing for the VLSI Era vol. 1; Process Technology; p. 198; 1986 Lattice Press; Sunset Beach, CA.
http://foldoc.doc.ic.ac.uk/foldoc/foldoc.cgi?DRAM; Jul. 11, 1996 pp. 1-3.

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