Method for fabricating a thin film and metal line of...

Details Method for fabricating a thin film and metal line of... Method for fabricating a thin film and metal line of...

2006-12-27

2008-10-21

Kebede, Brook (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S685000, C257SE21040

Reexamination Certificate

active

07439175

ABSTRACT:
A method for forming a thin film of a semiconductor device is provided. The method includes forming a TaN film on a semiconductor substrate, and converting a portion of the TaN film into a Ta film by reacting the TaN film with NO2. The Ta film is formed to have a thickness which is about half of the thickness of the TaN film.

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