Method for fabricating a plurality of elastic probes in a row

Details Method for fabricating a plurality of elastic probes in a row Method for fabricating a plurality of elastic probes in a row

2008-01-08

2008-01-08

Vo, Peter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S842000, C029S846000, C029S874000, C324S761010, C361S772000

Reexamination Certificate

active

07316065

ABSTRACT:
A method of forming a plurality of elastic probes in a row is disclosed. Firstly, a substrate is provided, then, a shaping layer is formed on the substrate so as to offer two flat surfaces in parallel. A photoresist layer is formed on the substrate and on the shaping layer. Then, the photoresist layer is patterned to form a plurality of slots crossing an interface between the two flat surfaces where a plurality of elastic probes are formed in the slots. In one embodiment, the interface is an edge slope of the shaping layer so that each of the elastic probes has at least an elastic bending portion. During chip probing, the shifting direction of the elastic probes due to overdrives is perpendicular to the arranging direction of the bonding pads so that the elastic probes are suitable for probing chips with high-density and fine-pitch bonding pads.

REFERENCES:
patent: 6229100 (2001-05-01), Fjelstad
patent: 6274822 (2001-08-01), Light et al.
patent: 6807734 (2004-10-01), Eldridge et al.
patent: TW517320 (2003-01-01), None

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