Method for fabricating a contact hole plane in a memory module

Details Method for fabricating a contact hole plane in a memory module Method for fabricating a contact hole plane in a memory module

2006-03-28

2006-03-28

Barreca, Nicole (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S311000, C430S313000, C430S316000, C430S317000

Reexamination Certificate

active

07018781

ABSTRACT:
Disclosed is a method for fabricating a contract hole plane in a memory module with an arrangement of memory cells each having a selection transistor. The methods can be utilized during the production of dynamic random access memory (DRAM) modules.

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patent: 01-09948 (2001-02-01), None

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