Method for fabricating a capacitor

Details Method for fabricating a capacitor Method for fabricating a capacitor

2011-01-04

2011-01-04

Loke, Steven (Department: 2818)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S255000, C438S298000, C257SE21010

Reexamination Certificate

active

07863149

ABSTRACT:
In a method for fabricating a capacitor that includes an electrode structure (80), an auxiliary layer (40) is formed over a substrate (10). A recess (60), which determines the shape of the electrode structure (80), is etched into the auxiliary layer (40), and the electrode structure of the capacitor is formed in the recess. As an example, the auxiliary layer can be a semiconductor layer (40).

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